F 414
Error message
Deprecated function: The each() function is deprecated. This message will be suppressed on further calls in menu_set_active_trail() (line 2405 of /home/floka820/public_html/flokal.com/includes/menu.inc).Flokal Liquid Vapor Controller F 141 designed to measure and control the mass flow rate of doping materials by varying the flow of carrier gas through a bubbler containing the source material.
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Accuracy of Thermal MFC, MFM:
+/- 4% of F.S.
Type of MFC,MFM:
See catalogue for more details
Full Scale of Thermal MFC, MFM:
Carrier gas flow range: 50 sccm - 10 slm; Vapor flow range: 12 mg/min - 40 g/min
Input/Output of Thermal MFC, MFM:
See catalogue for more details
